Probing impact on pad moisture tightness: A challenge for pad size reduction
Résumé
This paper underlines the damages induced by probing on narrow pads reliability of specifically designed test structures placed on dicing streets and indicates that probing during electrical test steps provokes detrimental cracks diving from the passivation through the BEOL layers providing a path for moisture ingress.
| Origine | Fichiers produits par l'(les) auteur(s) |
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