Application of PSD for the extraction of programmed line roughness from SAXS - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2019
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hal-02344561 , version 1 (04-11-2019)

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Jérôme Reche, Maxime Besacier, Patrice Gergaud, Yoann Blancquaert. Application of PSD for the extraction of programmed line roughness from SAXS. Metrology, Inspection, and Process Control for Microlithography XXXIII, Feb 2019, San Jose, United States. pp.28, ⟨10.1117/12.2514919⟩. ⟨hal-02344561⟩
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