Quasi in situ advanced characterizations for materials upfront studies and process development in microelectronic The IMPACT Project : Merging academic research and industrial applications - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2018
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hal-01960827 , version 1 (19-12-2018)

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  • HAL Id : hal-01960827 , version 1

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B. Pelissier, S. Labau, Jh. Tortai, J. Moeyaert, C. Beitia, et al.. Quasi in situ advanced characterizations for materials upfront studies and process development in microelectronic The IMPACT Project : Merging academic research and industrial applications. NANOSCIENCES 2018, 26 Novembre 2018, Nov 2018, Barcelone, Spain. ⟨hal-01960827⟩
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