Quasi in situ advanced characterizations for materials upfront studies and process development in microelectronic The IMPACT Project : Merging academic research and industrial applications - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2018

Quasi in situ advanced characterizations for materials upfront studies and process development in microelectronic The IMPACT Project : Merging academic research and industrial applications

Domaines

Physique [physics]

Marielle Clot  : Connectez-vous pour contacter le contributeur

https://hal.univ-grenoble-alpes.fr/hal-01960827

Soumis le : mercredi 19 décembre 2018-15:43:25

Dernière modification le : mercredi 18 décembre 2024-10:13:12

Fichier non déposé

Dates et versions

hal-01960827 , version 1 (19-12-2018)

Identifiants

  • HAL Id : hal-01960827 , version 1

Citer

B. Pelissier, S. Labau, Jh. Tortai, J. Moeyaert, C. Beitia, et al.. Quasi in situ advanced characterizations for materials upfront studies and process development in microelectronic The IMPACT Project : Merging academic research and industrial applications. NANOSCIENCES 2018, 26 Novembre 2018, Nov 2018, Barcelone, Spain. ⟨hal-01960827⟩

Exporter

BibTeX XML-TEI Dublin Core DC Terms EndNote DataCite

Collections

CEA UGA CNRS LTM LITHOGRAPHY NANOMATERIALS PLASMA_ETCHING DRT LETI CEA-GRE
124 Consultations
0 Téléchargements

Partager

More