Fast open-air deposition of nanomertic components for (opto)electronic devices through Spatial Atomic Layer Deposition - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2022

Fast open-air deposition of nanomertic components for (opto)electronic devices through Spatial Atomic Layer Deposition

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Matériaux
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Dates et versions

hal-04638795 , version 1 (08-07-2024)

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  • HAL Id : hal-04638795 , version 1

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David Munoz-Rojas. Fast open-air deposition of nanomertic components for (opto)electronic devices through Spatial Atomic Layer Deposition. MRS Spring 2022, Materials Research Society, May 2022, Honololu, United States. ⟨hal-04638795⟩
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