Fast open-air deposition of nanomertic components for (opto)electronic devices through Spatial Atomic Layer Deposition - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2022

Fast open-air deposition of nanomertic components for (opto)electronic devices through Spatial Atomic Layer Deposition

Domaines

Matériaux
Fichier non déposé

Dates et versions

hal-04638795 , version 1 (08-07-2024)

Identifiants

  • HAL Id : hal-04638795 , version 1

Citer

David Munoz-Rojas. Fast open-air deposition of nanomertic components for (opto)electronic devices through Spatial Atomic Layer Deposition. MRS Spring 2022, Materials Research Society, May 2022, Honololu, United States. ⟨hal-04638795⟩
11 Consultations
0 Téléchargements

Partager

More