Optical and electrical diagnostics of industrial plasma reactors: measuring the relevant physical quantities to assist process development - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2022

Optical and electrical diagnostics of industrial plasma reactors: measuring the relevant physical quantities to assist process development

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Physique [physics]

Marielle Clot  : Connectez-vous pour contacter le contributeur

https://hal.univ-grenoble-alpes.fr/hal-03777001

Soumis le : mercredi 14 septembre 2022-11:14:09

Dernière modification le : mercredi 18 décembre 2024-09:43:03

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Dates et versions

hal-03777001 , version 1 (14-09-2022)

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  • HAL Id : hal-03777001 , version 1

Citer

G. Cunge, S. Younesi, N. Loubet, M. Kogelschatz, E. Pargon, et al.. Optical and electrical diagnostics of industrial plasma reactors: measuring the relevant physical quantities to assist process development. AVS 68th, Nov 2022, Pittsburgh, United States. ⟨hal-03777001⟩

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