Origin of fluorine cross-contamination in the Topographically Selective Deposition of Ta2O5 using super-cycles of PEALD and Quasi-ALE - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2021

Origin of fluorine cross-contamination in the Topographically Selective Deposition of Ta2O5 using super-cycles of PEALD and Quasi-ALE

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hal-03449155 , version 1 (25-11-2021)

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  • HAL Id : hal-03449155 , version 1

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Moustapha Jaffal, Guy Scoggin, Gauthier Lefevre, Rémy Gassilloud, Nicolas Posseme, et al.. Origin of fluorine cross-contamination in the Topographically Selective Deposition of Ta2O5 using super-cycles of PEALD and Quasi-ALE. 7ème edition du colloque RAFALD, Nov 2021, Marseille, France. ⟨hal-03449155⟩
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