Physical and Electrical Properties of Hf0.5Zr0.5O2 Thin films RF sputtered by a HZO monotarget - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2021

Physical and Electrical Properties of Hf0.5Zr0.5O2 Thin films RF sputtered by a HZO monotarget

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hal-03448203 , version 1 (25-11-2021)

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  • HAL Id : hal-03448203 , version 1

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Hachemi Mohammed Bilal. Physical and Electrical Properties of Hf0.5Zr0.5O2 Thin films RF sputtered by a HZO monotarget. EMRS 2021, May 2021, Grenoble, France. ⟨hal-03448203⟩
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