A Complete Si Photonics Platform Embedding Ultra-Low Loss Waveguides for O- and C-Band
Résumé
We report ultra-low propagation losses in silicon submicrometric waveguides on a 200 mm CMOS compatible photonics platform. We show losses in C-band (O-band) as low as 0.1 dB/cm and 0.7dB/cm (0.14dB/cm and 1.1dB/cm) in monomode rib and strip waveguide geometries, respectively, thanks to a H2 smoothing annealing. In addition to optical losses down to unprecedented levels in silicon waveguides, we show that the performance characteristics of the main passive and active building blocks of the photonics platform are preserved or even improved by the smoothing process.
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