Study of physisorption phenomena of chemical species on 300 mm Si wafers during controlled mini-environment transfers between microelectronic equipments - Université Grenoble Alpes
Article Dans Une Revue Microelectronic Engineering Année : 2020

Study of physisorption phenomena of chemical species on 300 mm Si wafers during controlled mini-environment transfers between microelectronic equipments

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Physique [physics]

Marielle Clot  : Connectez-vous pour contacter le contributeur

https://hal.univ-grenoble-alpes.fr/hal-02917565

Soumis le : mercredi 19 août 2020-14:43:18

Dernière modification le : mercredi 18 décembre 2024-10:10:28

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hal-02917565 , version 1 (19-08-2020)

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B. Pelissier, S. Labau, M. Martin, C. Petit-Etienne, H. Fontaine, et al.. Study of physisorption phenomena of chemical species on 300 mm Si wafers during controlled mini-environment transfers between microelectronic equipments. Microelectronic Engineering, 2020, 231, pp.111401. ⟨10.1016/j.mee.2020.111401⟩. ⟨hal-02917565⟩

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