Investigation of TiN nucleation mechanisms during PEALD assisted by medium energy ions - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2019

Investigation of TiN nucleation mechanisms during PEALD assisted by medium energy ions

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Dates et versions

hal-02623965 , version 1 (26-05-2020)

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  • HAL Id : hal-02623965 , version 1

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Samia Belahcen. Investigation of TiN nucleation mechanisms during PEALD assisted by medium energy ions. 19th conference on Atomic Layer Deposition, Jul 2019, Bellevue (Washington - USA), United States. ⟨hal-02623965⟩
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