A brief overview on Molecular Dynamics simulations of plasma-surface interaction in reactive ion etching - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2019

A brief overview on Molecular Dynamics simulations of plasma-surface interaction in reactive ion etching

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hal-02337554 , version 1 (29-10-2019)

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  • HAL Id : hal-02337554 , version 1

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Emilie Despiau-Pujo. A brief overview on Molecular Dynamics simulations of plasma-surface interaction in reactive ion etching. 66th American Vacuum Society (AVS) International Symposium, Oct 2019, Columbus, United States. ⟨hal-02337554⟩
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