The IMPACT Project : Merging academic research and 300mm industrial applications
Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics

Bernard Pelissier

Communication Dans Un Congrès Année : 2019

The IMPACT Project : Merging academic research and 300mm industrial applications Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics

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1

Bernard Pelissier

Fonction : Auteur

Laboratoire des technologies de la microélectronique

Domaines

Micro et nanotechnologies/Microélectronique

Marielle Clot : Connectez-vous pour contacter le contributeur

https://hal.univ-grenoble-alpes.fr/hal-02331976

Soumis le : jeudi 24 octobre 2019-15:43:58

Dernière modification le : jeudi 4 avril 2024-21:09:28

Dates et versions

hal-02331976 , version 1 (24-10-2019)

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HAL Id : hal-02331976 , version 1

Citer

Bernard Pelissier. The IMPACT Project : Merging academic research and 300mm industrial applications Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics. XPS Workshop ThermoFisher, Jun 2019, Versailles, France. ⟨hal-02331976⟩

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