Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 - The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2019

Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 - The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic

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hal-02117215 , version 1 (02-05-2019)

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  • HAL Id : hal-02117215 , version 1

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Bernard Pelissier. Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 - The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic. 30th World Nano Conference, May 2019, Zurich, Switzerland. ⟨hal-02117215⟩
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