Chemical depth profiling and 3D reconstruction of III-V heterostructures selectively grown on non-planar Si substrates by MOCVD - Université Grenoble Alpes
Article Dans Une Revue physica status solidi (RRL) - Rapid Research Letters Année : 2015

Chemical depth profiling and 3D reconstruction of III-V heterostructures selectively grown on non-planar Si substrates by MOCVD

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hal-01991901 , version 1 (24-01-2019)

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V. Gorbenko, M. Veillerot, A. Grenier, G. Audoit, W. Hourani, et al.. Chemical depth profiling and 3D reconstruction of III-V heterostructures selectively grown on non-planar Si substrates by MOCVD. physica status solidi (RRL) - Rapid Research Letters, 2015, 9 (3), pp.202-205. ⟨10.1002/pssr.201409544⟩. ⟨hal-01991901⟩
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