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Performance of ZnO based piezo-generators under controlled compression

Abstract : This paper reports on the fabrication and characterization of ZnO based vertically integrated nanogenerator (VING) devices under controlled compression. The basic NG structure is a composite material integrating hydrothermally grown vertical piezoelectric zinc oxide (ZnO) nanowires (NWs) into a dielectric matrix (PMMA). A specific characterization set-up has been developed to control the applied compression and the perpendicularity of the applied force on the devices. The role of different fabrication parameters has been evaluated experimentally and compared with previously reported theoretical models, including the thickness of the top PMMA layer and the density of the NWs array in the matrix. Finally, the performance of the VING structure has been evaluated experimentally for different resistive loads obtaining a power density of 85 μW cm−3 considering only the active layer of the device. This has been compared to the performance of a commercial bulk layer of PZT (25 μW cm−3) under the same applied force of 5 N.
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Contributeur : Mireille Mouis <>
Soumis le : vendredi 18 janvier 2019 - 18:42:06
Dernière modification le : jeudi 6 août 2020 - 03:38:04




Ran Tao, Mitesh Parmar, Gustavo Ardila, Paulo Oliveira, Daniel Marques, et al.. Performance of ZnO based piezo-generators under controlled compression. Semiconductor Science and Technology, IOP Publishing, 2017, 32 (6), pp.064003. ⟨10.1088/1361-6641/aa691f⟩. ⟨hal-01986533⟩



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