Atomic Layer Processing (from ALD to ASD) for next generation of SC devices - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2018

Atomic Layer Processing (from ALD to ASD) for next generation of SC devices

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Dates et versions

hal-01960040 , version 1 (19-12-2018)

Identifiants

  • HAL Id : hal-01960040 , version 1

Citer

C. Vallee, C. Mannequin. Atomic Layer Processing (from ALD to ASD) for next generation of SC devices. 2018 Joint Symposium on Energy Materials Science and Technology (Workshop of Pre-Strategic Initiatives), Mar 2018, Tsukuba, Japan. ⟨hal-01960040⟩
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