Use of low energy ion scattering for the analysis of area selective ALD processes - Université Grenoble Alpes
Poster De Conférence Année : 2018

Use of low energy ion scattering for the analysis of area selective ALD processes

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hal-01959049 , version 1 (18-12-2018)

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  • HAL Id : hal-01959049 , version 1

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T. Grehl, P. Brüne, C. Vallee, B. Pelissier. Use of low energy ion scattering for the analysis of area selective ALD processes. 18th International Conference on Atomic layer Deposition (ALD2018), Jul 2018, Incheon, South Korea. ⟨hal-01959049⟩
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