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Communication dans un congrès

Toward the integration of Si nanonets into FETs for biosensing applications

Abstract : This paper reports on the first integration of silicon nanonet into long channel field effect transistors using standard optical microelectronic methods. The electrical characteristics of these devices constituted by randomly oriented silicon nanowires are also studied. Compatible integration on the back-end of CMOS readout and promising electrical performances open new opportunities for sensing applications.
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https://hal.univ-grenoble-alpes.fr/hal-01929331
Contributeur : Marielle Clot <>
Soumis le : mercredi 21 novembre 2018 - 10:26:43
Dernière modification le : jeudi 6 août 2020 - 03:38:08

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M. Legallais, T. Nguyen, M. Mouis, B. Salem, C. Ternon. Toward the integration of Si nanonets into FETs for biosensing applications. 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Apr 2017, Athens, Greece. pp.231-234, ⟨10.1109/ULIS.2017.7962570⟩. ⟨hal-01929331⟩

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