High throughput sub-10 nm metallic particles organization on templates made by block copolymer self-assembly and nanoimprint - Université Grenoble Alpes
Article Dans Une Revue Microelectronic Engineering Année : 2015

High throughput sub-10 nm metallic particles organization on templates made by block copolymer self-assembly and nanoimprint

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hal-01869181 , version 1 (06-09-2018)

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  • HAL Id : hal-01869181 , version 1

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J. Arias-Zapata, J. Cordeiro, S. Böhme, C. Girardot, J. Garnier, et al.. High throughput sub-10 nm metallic particles organization on templates made by block copolymer self-assembly and nanoimprint. Microelectronic Engineering, 2015, 141, pp.155. ⟨hal-01869181⟩
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