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High Performance and Low Energy Consumption in Phase Change Material RF Switches

Abstract

This paper presents a RF to mm-wave switch based on Germanium Telluride phase change material. An integration process compatible with a standard CMOS back end of line is proposed to realize directly heated switches. RF measurements, performed up to 65 GHz, show an ON-state resistance of 1 Ω with an OFF-state capacitance of 7 fF corresponding to a 22 THz cutoff frequency which constitutes a state-of-the-art Figure-of-Merit. Switching time of only 60 ns in both phase changes allow energy consumption one decade lower than the state-of-the-art for crystallization. A geometrical variation of GeTe dimensions shows a linear evolution of RF performance in terms of ON-state resistance and an almost unchanged performance in the OFF-state.
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Dates and versions

hal-02066763 , version 1 (01-07-2020)

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Alexandre Leon, Bruno Reig, Vincent Puyal, Etienne Perret, Philippe Ferrari, et al.. High Performance and Low Energy Consumption in Phase Change Material RF Switches. 2018 48th European Microwave Conference (EuMC), Sep 2018, Madrid, Spain. pp.491-494, ⟨10.23919/EuMC.2018.8541622⟩. ⟨hal-02066763⟩
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