Design and test of next generation integrated systems embedding MEMS
Résumé
This paper presents an overview of microelectromechanical systems (MEMS) research topics. Manufacturing technologies, including bulk and surface micromachining, are illustrated using fabricated devices. Optimal exploitation of these technologies relies on the integration in a single chip of MEMS parts with their electronic interfaces. Current challenges for bringing the analysis, design and test of these new generation of devices in line with microelectronics are then discussed.