Grazing incidence X-ray diffraction Hillocks Silicon nitride Silicon Nanoparticles Oxide materials Hafnium silicate Magnetron sputtering RF magnetron sputtering ADE-FDTD Couches minces Hafnium silicates Pulvérisation cathodique Thin film Oxides GENOMIQUE High-k dielectrics Raman scattering Lifetime Guide d'onde Multilayers Semiconductors Refractive index Conductivity Doping Films Electroluminescence Crystal structure Nanoparticules Epitaxy IR spectroscopy Rare-earth ions Liposomes Si nanocluster Optical amplifiers Si-rich silicon oxide Rare-earth Laser pyrolysis Atom probe tomography Microstructure physique Feature erasure Terbium Pulvérisation magnétron radiofréquence Silicium Rare earth XRD Citric acid Computational electromagnetic methods Nanostructures Rare-earth- doped materials Microstructure Al2O3 Photovoltaic AFM MoS2 Luminescence Radiofrequency magnetron sputtering Quantum-well FTIR Waveguides Down-conversion Fluorescence Rare-earth-doped materials Oxygen vacancies Sputtering Phase transition CO adsorption Cerium CoMoS Infrared absorption Couches minces semi-conductrices Erbium Cathodoluminescence Terres rares Matériaux hybrides Nanostructured materials Thin films Waveguide Electron paramagnetic resonance Silicon photonics PZT Nanostructure HR STEM-HAADF SiC Structural properties Reactive magnetron sputtering Microstructure physics Irradiation M-lines Nanostructuring Friction Photoluminescence Neodymium Energy transfer Rare earths Oxide interface Resistive Switching Silicon nanocrystals Silicon nanoclusters Raman