Cyclic BCl3-based plasma treatments for enhancing surface quality of (010) β-Ga2O3 substrates

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http://hal.univ-grenoble-alpes.fr/hal-02338953
Contributor : Marielle Clot <>
Submitted on : Wednesday, October 30, 2019 - 11:04:26 AM
Last modification on : Friday, November 1, 2019 - 1:06:00 AM

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  • HAL Id : hal-02338953, version 1

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Y. Douest, C. Mannequin, T. Ito, Y. Ozaki, C. Vallee, et al.. Cyclic BCl3-based plasma treatments for enhancing surface quality of (010) β-Ga2O3 substrates. Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10), Jul 2019, Sapporo, Japan. ⟨hal-02338953⟩

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