Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective

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http://hal.univ-grenoble-alpes.fr/hal-02337524
Contributor : Marielle Clot <>
Submitted on : Tuesday, October 29, 2019 - 2:55:27 PM
Last modification on : Thursday, October 31, 2019 - 1:16:14 PM

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Kenji Ishikawa, Tatsuo Ishijima, Tatsuru Shirafuji, Silvia Armini, Emilie Despiau-Pujo, et al.. Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective. Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2019, 58 (SE), pp.SE0801. ⟨10.7567/1347-4065/ab163e⟩. ⟨hal-02337524⟩

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