PiezoNEMS: Semiconductor nanowires and heterostructures for sensing and energy harvesting

L. Montès 1 X. Xu 2 A. Potie 3 B. Bercu 1 R. Hinchet 1 F. Rochette 4 G. Ardila 1 P. Morfouli M. Mouis 1 R. Songmuang 5 B. Salem 3 T. Baron 3
1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
2 Grenoble INP - Institut polytechnique de Grenoble - Grenoble Institute of Technology
3 LTM - Laboratoire des technologies de la microélectronique
4 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information
5 UGA - Université Grenoble Alpes
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Conference papers
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http://hal.univ-grenoble-alpes.fr/hal-02333027
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Submitted on : Friday, October 25, 2019 - 10:48:12 AM
Last modification on : Tuesday, October 29, 2019 - 9:09:15 AM

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L. Montès, X. Xu, A. Potie, B. Bercu, R. Hinchet, et al.. PiezoNEMS: Semiconductor nanowires and heterostructures for sensing and energy harvesting. 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) - formerly known as the Semiconductor Conference Dresden (SCD), Sep 2012, Grenoble, France. pp.69-74, ⟨10.1109/ISCDG.2012.6359987⟩. ⟨hal-02333027⟩

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