The IMPACT Project : Merging academic research and 300mm industrial applications Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics

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http://hal.univ-grenoble-alpes.fr/hal-02331976
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Submitted on : Thursday, October 24, 2019 - 3:43:58 PM
Last modification on : Friday, October 25, 2019 - 2:01:57 AM

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Bernard Pelissier. The IMPACT Project : Merging academic research and 300mm industrial applications Quasi in situ advanced characterizations for Materials upfront studies and Process development in microelectronics. XPS Workshop ThermoFisher, Jun 2019, Versailles, France. ⟨hal-02331976⟩

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