Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 - The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic

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http://hal.univ-grenoble-alpes.fr/hal-02117215
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Submitted on : Thursday, May 2, 2019 - 10:10:57 AM
Last modification on : Friday, May 3, 2019 - 8:46:39 AM

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Bernard Pelissier. Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 - The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic. 30th World Nano Conference, May 2019, Zurich, Switzerland. ⟨hal-02117215⟩

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