CMOS platform for atomic-scale device fabrication

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http://hal.univ-grenoble-alpes.fr/hal-02004029
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Submitted on : Friday, February 1, 2019 - 3:04:49 PM
Last modification on : Tuesday, November 5, 2019 - 1:58:39 PM

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Tomáš Škereň, Nikola Pascher, Arnaud Garnier, Patrick Reynaud, Emmanuel Rolland, et al.. CMOS platform for atomic-scale device fabrication. Nanotechnology, Institute of Physics, 2018, 29 (43), pp.435302. ⟨10.1088/1361-6528/aad7ab⟩. ⟨hal-02004029⟩

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