InGaAs-OI Substrate Fabrication on a 300 mm Wafer

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http://hal.univ-grenoble-alpes.fr/hal-01991855
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Submitted on : Thursday, January 24, 2019 - 10:18:43 AM
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  • HAL Id : hal-01991855, version 1

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A. Lecestre, N. Mallet, G. Larrieu, Sebastien Sollier, Julie Widiez, et al.. InGaAs-OI Substrate Fabrication on a 300 mm Wafer. Journal of Low Power Electronics and Applications, MDPI, 2016, 6 (4), pp.19. ⟨hal-01991855⟩

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