Article Dans Une Revue IEEE Transactions on Semiconductor Manufacturing Année : 2022

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hal-04907067 , version 1 (22-01-2025)

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Jerome Reche, Patrice Gergaud, Yoann Blancquaert, Maxime Besacier, Guillaume Freychet. Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations. IEEE Transactions on Semiconductor Manufacturing, 2022, 35 (3), pp.425-431. ⟨10.1109/TSM.2022.3176026⟩. ⟨hal-04907067⟩
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