SF6- and CF-based plasmas interaction with Si and SiO2 at room and cryogenic temperature: Insights from molecular dynamics simulation” - Université Grenoble Alpes
Communication Dans Un Congrès Année : 2024

SF6- and CF-based plasmas interaction with Si and SiO2 at room and cryogenic temperature: Insights from molecular dynamics simulation”

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hal-04805159 , version 1 (26-11-2024)

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  • HAL Id : hal-04805159 , version 1

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J. Romero Cedillo, G. Cunge, E. Despiau-Pujo. SF6- and CF-based plasmas interaction with Si and SiO2 at room and cryogenic temperature: Insights from molecular dynamics simulation”. 70th American Vacuum Society (AVS) International Symposium, Nov 2024, Tampa, United States. ⟨hal-04805159⟩
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