HAL TEI export of hal-02338953
CCSD
CC0 1.0 - Universal
HAL API Platform
Cyclic BCl3-based plasma treatments for enhancing surface quality of (010) β-Ga2O3 substrates
Y.
Douest
1692011-0
C.
Mannequin
585605-0
T.
Ito
278907-0
Y.
Ozaki
1692012-0
C.
Vallee
62246-0
E.
Gheeraert
775a46e8c4785de5e74fd21943b5ebd8
neel.cnrs.fr
etienne-gheeraert
3851
87409-3851
http://www.researcherid.com/rid/E-8071-2015
https://orcid.org/0000-0002-9952-5805
https://www.idref.fr/075094541
http://www.researcherid.com/rid/http://www.researcherid.com/rid/E-8071-2015
K.
Akimoto
1692013-0
M.
Sasaki
755215
67321-755215
https://orcid.org/0000-0001-5302-1866
T.
Teramoto
1692014-0
C.
Dussarat
1692015-0
Marielle
Clot
0b34f9a3638603b13afd163215bd2ff1
cea.fr
2019-10-30 11:04:26
2025-09-27 19:26:06
2019-10-30 11:04:26
2019-07
contributor
Marielle
Clot
0b34f9a3638603b13afd163215bd2ff1
cea.fr
CCSD
hal-02338953
https://hal.univ-grenoble-alpes.fr/hal-02338953
douest:hal-02338953
<i>Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)</i>, Jul 2019, Sapporo, Japan
Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10), Jul 2019, Sapporo, Japan
CEA - Commissariat à l'énergie atomique
HAL Grenoble Alpes
CNRS - Centre national de la recherche scientifique
Institut polytechnique de Grenoble
Institut Néel
Laboratoire des technologies de la microélectronique
Direction de la recherche fondamentale - sciences du vivant
Semi-conducteurs à large bande interdite
Direction de Recherche Fondamentale
Polytech Grenoble
Collection test HAL CNRS
Université Grenoble Alpes [2016-2019]
TEST-UGA
International
No
No
Yes
No
Cyclic BCl3-based plasma treatments for enhancing surface quality of (010) β-Ga2O3 substrates
Y.
Douest
1692011-0
C.
Mannequin
585605-0
T.
Ito
278907-0
Y.
Ozaki
1692012-0
C.
Vallee
62246-0
E.
Gheeraert
775a46e8c4785de5e74fd21943b5ebd8
neel.cnrs.fr
etienne-gheeraert
3851
87409-3851
http://www.researcherid.com/rid/E-8071-2015
https://orcid.org/0000-0002-9952-5805
https://www.idref.fr/075094541
http://www.researcherid.com/rid/http://www.researcherid.com/rid/E-8071-2015
K.
Akimoto
1692013-0
M.
Sasaki
755215
67321-755215
https://orcid.org/0000-0001-5302-1866
T.
Teramoto
1692014-0
C.
Dussarat
1692015-0
Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)
2019-07
Sapporo
Japan
English
Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Conference papers
Conference papers
Conference papers
184687586
0000 0004 0382 8743
200111811N
https://ror.org/036zswm25
Laboratoire des technologies de la microélectronique
LTM
1999-01-01
2015-12-31
LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9
[https://ltmlab.fr/]
Graduate School of Environmental Studies [Nagoya]
Furo-cho, Chikusa-ku, Nagoya, Japan 464-8601
[http://www.env.nagoya-u.ac.jp/english/]
Semi-conducteurs à large bande interdite
NEEL - SC2G
2016-01-01
2019-12-31
Institut NEEL, 25 rue des Martyrs, BP 166,38042 Grenoble cedex 9
026404796
https://ror.org/02aj0kh94
Université Joseph Fourier - Grenoble 1
UJF
2015-12-31
BP 53 - 38041 Grenoble Cedex 9
[http://www.ujf-grenoble.fr/]
026372061
0000000122998025
https://ror.org/00jjx8s55
Q868550
Commissariat à l'énergie atomique et aux énergies alternatives
CEA
Centre de SaclayCentre de GrenobleCentre de Cadaracheetc
[http://www.cea.fr/]
02636817X
0000000122597504
https://ror.org/02feahw73
Centre National de la Recherche Scientifique
CNRS
1939-10-19
[https://www.cnrs.fr/]
000000010943978X
https://ror.org/04chrp450
Nagoya University
Furo-cho, Chikusa-ku, Nagoya, 464-8601, Japan
[http://en.nagoya-u.ac.jp]
183998693
0000 0004 0369 268X
200717524X
https://ror.org/04dbzz632
Institut Néel
NEEL
2016-01-01
2019-12-31
Institut NEEL, 25 rue des Martyrs, BP 166,38042 Grenoble cedex 9
[http://www.neel.cnrs.fr/]
026388804
https://ror.org/05sbt2524
Institut polytechnique de Grenoble - Grenoble Institute of Technology
Grenoble INP
2007-01-01
2019-12-31
46 avenue Félix Viallet 38031 Grenoble Cedex 1
[http://www.grenoble-inp.fr/]
188399275
https://ror.org/02rx3b187
Université Grenoble Alpes [2016-2019]
UGA [2016-2019]
2016-01-01
2019-12-31
38058 Grenoble cedex