<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-01991879</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-17T04:01:20+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Anti-phase boundaries–Free GaAs epilayers on “quasi-nominal” Ge-buffered silicon substrates</title>
            <author role="aut">
              <persName>
                <forename type="first">Y.</forename>
                <surname>Bogumilowicz</surname>
              </persName>
              <idno type="halauthorid">615958-0</idno>
              <affiliation ref="#struct-40214"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">J.</forename>
                <surname>Hartmann</surname>
              </persName>
              <idno type="halauthorid">108886-0</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">R.</forename>
                <surname>Cipro</surname>
              </persName>
              <idno type="halauthorid">881444-0</idno>
              <affiliation ref="#struct-616"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">R.</forename>
                <surname>Alcotte</surname>
              </persName>
              <idno type="halauthorid">1339957-0</idno>
              <affiliation ref="#struct-616"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">M.</forename>
                <surname>Martin</surname>
              </persName>
              <idno type="halauthorid">75385-0</idno>
              <affiliation ref="#struct-616"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">F.</forename>
                <surname>Bassani</surname>
              </persName>
              <email type="md5">998cf9f8f7da1e1cce2c72f218e249bc</email>
              <email type="domain">cea.fr</email>
              <idno type="idhal" notation="string">franck-bassani</idno>
              <idno type="idhal" notation="numeric">1188804</idno>
              <idno type="halauthorid" notation="string">58577-1188804</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-8688-1328</idno>
              <affiliation ref="#struct-616"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">J.</forename>
                <surname>Moeyaert</surname>
              </persName>
              <idno type="halauthorid">683162-0</idno>
              <affiliation ref="#struct-616"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">T.</forename>
                <surname>Baron</surname>
              </persName>
              <email type="md5">ef1ec4432a6fa817348da56d28ae59e0</email>
              <email type="domain">cea.fr</email>
              <idno type="idhal" notation="string">thierry-baron</idno>
              <idno type="idhal" notation="numeric">739925</idno>
              <idno type="halauthorid" notation="string">139701-739925</idno>
              <idno type="IDREF">https://www.idref.fr/130661813</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-5005-6596</idno>
              <affiliation ref="#struct-616"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">J.</forename>
                <surname>Pin</surname>
              </persName>
              <idno type="halauthorid">1149076-0</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">X.</forename>
                <surname>Bao</surname>
              </persName>
              <idno type="halauthorid">281114-0</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Z.</forename>
                <surname>Ye</surname>
              </persName>
              <idno type="halauthorid">2525520-0</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">E.</forename>
                <surname>Sanchez</surname>
              </persName>
              <idno type="halauthorid">59844-0</idno>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Marielle</forename>
                <surname>Clot</surname>
              </persName>
              <email type="md5">0b34f9a3638603b13afd163215bd2ff1</email>
              <email type="domain">cea.fr</email>
            </editor>
            <funder ref="#projanr-37846"/>
            <funder>This work has been partially supported by the LabEx Minos ANR-10-LABX-55-01 and the French “Recherches Technologiques de Base” and RENATECH programs. The authors would sincerely like to thank Stephane Puget from AMAT for technical assistance on the MOVPE tool and Jérôme Siviniant from Sun Edison for fruitful scientific discussions on silicon substrates.</funder>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2022-12-20 15:23:06</date>
              <date type="whenModified">2025-09-27 19:46:19</date>
              <date type="whenReleased">2023-01-11 13:29:23</date>
              <date type="whenProduced">2015-11-23</date>
              <date type="whenEndEmbargoed">2022-12-20</date>
              <ref type="file" target="https://hal.univ-grenoble-alpes.fr/hal-01991879v1/document">
                <date notBefore="2022-12-20"/>
              </ref>
              <ref type="file" subtype="greenPublisher" n="1" target="https://hal.univ-grenoble-alpes.fr/hal-01991879v1/file/Bogumilowicz2015.pdf" id="file-3908308-3416949">
                <date notBefore="2022-12-20"/>
              </ref>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="128943">
                <persName>
                  <forename>Marielle</forename>
                  <surname>Clot</surname>
                </persName>
                <email type="md5">0b34f9a3638603b13afd163215bd2ff1</email>
                <email type="domain">cea.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-01991879</idno>
            <idno type="halUri">https://hal.univ-grenoble-alpes.fr/hal-01991879</idno>
            <idno type="halBibtex">bogumilowicz:hal-01991879</idno>
            <idno type="halRefHtml">&lt;i&gt;Applied Physics Letters&lt;/i&gt;, 2015, 107 (21), pp.212105. &lt;a target="_blank" href="https://dx.doi.org/10.1063/1.4935943"&gt;&amp;#x27E8;10.1063/1.4935943&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Applied Physics Letters, 2015, 107 (21), pp.212105. &amp;#x27E8;10.1063/1.4935943&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-3908308-3416949"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="CEA">CEA - Commissariat à l'énergie atomique</idno>
            <idno type="stamp" n="UGA">HAL Grenoble Alpes</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-GRENOBLE1">Université Joseph Fourier - Grenoble I</idno>
            <idno type="stamp" n="INPG">Institut polytechnique de Grenoble</idno>
            <idno type="stamp" n="LTM" corresp="FMNT">Laboratoire des technologies de la microélectronique</idno>
            <idno type="stamp" n="NANOMATERIALS" corresp="LTM">Nanomaterials</idno>
            <idno type="stamp" n="DRT" corresp="CEA">Direction de la recherche technologique</idno>
            <idno type="stamp" n="LETI" corresp="CEA">Laboratoire d'Electronique et des Technologies de l'Information</idno>
            <idno type="stamp" n="CEA-GRE" corresp="CEA">CEA Grenoble</idno>
            <idno type="stamp" n="ANR">ANR</idno>
            <idno type="stamp" n="TEST-UGA">TEST-UGA</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Anti-phase boundaries–Free GaAs epilayers on “quasi-nominal” Ge-buffered silicon substrates</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Y.</forename>
                    <surname>Bogumilowicz</surname>
                  </persName>
                  <idno type="halauthorid">615958-0</idno>
                  <affiliation ref="#struct-40214"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">J.</forename>
                    <surname>Hartmann</surname>
                  </persName>
                  <idno type="halauthorid">108886-0</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">R.</forename>
                    <surname>Cipro</surname>
                  </persName>
                  <idno type="halauthorid">881444-0</idno>
                  <affiliation ref="#struct-616"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">R.</forename>
                    <surname>Alcotte</surname>
                  </persName>
                  <idno type="halauthorid">1339957-0</idno>
                  <affiliation ref="#struct-616"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">M.</forename>
                    <surname>Martin</surname>
                  </persName>
                  <idno type="halauthorid">75385-0</idno>
                  <affiliation ref="#struct-616"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">F.</forename>
                    <surname>Bassani</surname>
                  </persName>
                  <email type="md5">998cf9f8f7da1e1cce2c72f218e249bc</email>
                  <email type="domain">cea.fr</email>
                  <idno type="idhal" notation="string">franck-bassani</idno>
                  <idno type="idhal" notation="numeric">1188804</idno>
                  <idno type="halauthorid" notation="string">58577-1188804</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-8688-1328</idno>
                  <affiliation ref="#struct-616"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">J.</forename>
                    <surname>Moeyaert</surname>
                  </persName>
                  <idno type="halauthorid">683162-0</idno>
                  <affiliation ref="#struct-616"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">T.</forename>
                    <surname>Baron</surname>
                  </persName>
                  <email type="md5">ef1ec4432a6fa817348da56d28ae59e0</email>
                  <email type="domain">cea.fr</email>
                  <idno type="idhal" notation="string">thierry-baron</idno>
                  <idno type="idhal" notation="numeric">739925</idno>
                  <idno type="halauthorid" notation="string">139701-739925</idno>
                  <idno type="IDREF">https://www.idref.fr/130661813</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-5005-6596</idno>
                  <affiliation ref="#struct-616"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">J.</forename>
                    <surname>Pin</surname>
                  </persName>
                  <idno type="halauthorid">1149076-0</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">X.</forename>
                    <surname>Bao</surname>
                  </persName>
                  <idno type="halauthorid">281114-0</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Z.</forename>
                    <surname>Ye</surname>
                  </persName>
                  <idno type="halauthorid">2525520-0</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">E.</forename>
                    <surname>Sanchez</surname>
                  </persName>
                  <idno type="halauthorid">59844-0</idno>
                </author>
              </analytic>
              <monogr>
                <idno type="halJournalId" status="VALID">3073</idno>
                <idno type="issn">0003-6951</idno>
                <idno type="eissn">1077-3118</idno>
                <title level="j">Applied Physics Letters</title>
                <imprint>
                  <publisher>American Institute of Physics</publisher>
                  <biblScope unit="volume">107</biblScope>
                  <biblScope unit="issue">21</biblScope>
                  <biblScope unit="pp">212105</biblScope>
                  <date type="datePub">2015-11-23</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1063/1.4935943</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="phys">Physics [physics]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>We have obtained Anti-Phase Boundary (APB) free GaAs epilayers on “quasi-nominal” (001) silicon substrates, while using a thick germanium strain relaxed buffer between the GaAs layer and the silicon substrate in order to accommodate the 4% lattice mismatch between the two. As silicon (001) substrates always have a small random offcut angle from their nominal surface plane, we call them “quasi-nominal.” We have focused on the influence that this small (≤0.5°) offcut angle has on the GaAs epilayer properties, showing that it greatly influences the density of APBs. On 0.5° offcut substrates, we obtained smooth, slightly tensile strained (R = 106%) GaAs epilayers that were single domain (e.g., without any APB), showing that it is not necessary to use large offcut substrates, typically 4° to 6°, for GaAs epitaxy on silicon. These make the GaAs layers more compatible with the existing silicon manufacturing technology that uses “quasi-nominal” substrates.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-40214" status="VALID">
          <idno type="IdRef">026506351</idno>
          <idno type="ISNI">0000 0001 2184 7102</idno>
          <idno type="RNSR">196718590E</idno>
          <idno type="ROR">https://ror.org/04mf0wv34</idno>
          <idno type="Wikidata">Q1023249</idno>
          <orgName>Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information</orgName>
          <orgName type="acronym">CEA-LETI</orgName>
          <date type="start">1967-01-01</date>
          <desc>
            <address>
              <addrLine>MINATEC 17, rue des Martyrs, 38054, Grenoble Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www-leti.cea.fr/</ref>
          </desc>
          <listRelation>
            <relation name="DRT" active="#struct-440043" type="direct"/>
            <relation name="DRT" active="#struct-300016" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-616" status="OLD">
          <idno type="IdRef">184687586</idno>
          <idno type="ISNI">0000 0004 0382 8743</idno>
          <idno type="RNSR">200111811N</idno>
          <idno type="ROR">https://ror.org/036zswm25</idno>
          <orgName>Laboratoire des technologies de la microélectronique</orgName>
          <orgName type="acronym">LTM</orgName>
          <date type="start">1999-01-01</date>
          <date type="end">2015-12-31</date>
          <desc>
            <address>
              <addrLine>LETI/DTS 17 rue des martyrs 38054 GRENOBLE CEDEX 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://ltmlab.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-51016" type="direct"/>
            <relation active="#struct-300016" type="direct"/>
            <relation name="UMR5129 / EP2073" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="regrouplaboratory" xml:id="struct-440043" status="VALID">
          <idno type="IdRef">067087930</idno>
          <idno type="ISNI">0000000121157881</idno>
          <idno type="RNSR">199018589D</idno>
          <idno type="ROR">https://ror.org/02ggzyd20</idno>
          <idno type="Wikidata">Q30299418</idno>
          <orgName>Direction de Recherche Technologique (CEA)</orgName>
          <orgName type="acronym">DRT (CEA)</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.drt-cea.com/</ref>
          </desc>
          <listRelation>
            <relation name="DRT" active="#struct-300016" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-300016" status="VALID">
          <idno type="IdRef">026372061</idno>
          <idno type="ISNI">0000000122998025</idno>
          <idno type="ROR">https://ror.org/00jjx8s55</idno>
          <idno type="Wikidata">Q868550</idno>
          <orgName>Commissariat à l'énergie atomique et aux énergies alternatives</orgName>
          <orgName type="acronym">CEA</orgName>
          <desc>
            <address>
              <addrLine>Centre de SaclayCentre de GrenobleCentre de Cadaracheetc</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cea.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-51016" status="OLD">
          <idno type="IdRef">026404796</idno>
          <idno type="ROR">https://ror.org/02aj0kh94</idno>
          <orgName>Université Joseph Fourier - Grenoble 1</orgName>
          <orgName type="acronym">UJF</orgName>
          <date type="end">2015-12-31</date>
          <desc>
            <address>
              <addrLine>BP 53 - 38041 Grenoble Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ujf-grenoble.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
      </listOrg>
      <listOrg type="projects">
        <org type="anrProject" xml:id="projanr-37846" status="VALID">
          <idno type="anr">ANR-10-LABX-0055</idno>
          <idno type="program">Laboratoires d'excellence</idno>
          <orgName>MINOS Lab</orgName>
          <desc>Minatec Novel Devices Scaling Laboratory</desc>
          <date type="start">2010</date>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>