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Surface ionizing dose deposited by low energy electrons (10 eV–10 keV) in eleven monoatomic materials: Monte Carlo calculations and analytical expressions

Abstract : An analytical formula for the ionizing dose of low energy electrons is proposed. The expressions have been validated for 11 monatomic elements (C, Be, Al, Si, Ti, Ni, Cu, Ge, Ag, Fe and W) and for energies ranging from ∼ 10 eV up to 14.5 keV by the use of low energy Monte Carlo simulations. These expressions can be used to evaluate the energy loss of low energy electrons as an input for other simulation codes.
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https://hal.archives-ouvertes.fr/hal-03479282
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Submitted on : Tuesday, December 14, 2021 - 11:33:18 AM
Last modification on : Sunday, January 2, 2022 - 7:26:39 PM
Long-term archiving on: : Tuesday, March 15, 2022 - 6:46:22 PM

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Quentin Gibaru, Christophe Inguimbert, Pablo Caron, Mohamed Belhaj, Mélanie Raine, et al.. Surface ionizing dose deposited by low energy electrons (10 eV–10 keV) in eleven monoatomic materials: Monte Carlo calculations and analytical expressions. Applied Surface Science, Elsevier, 2022, 576 Part A, pp.151813. ⟨10.1016/j.apsusc.2021.151813⟩. ⟨hal-03479282⟩

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