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hal-00649910v1  Communication dans un congrès
F. ChaveL. VallierE. PargonO. JoubertS. Barnola et al.  Plasma Etching Challenges for Porous SiOCH Integration In Advanced Interconnect Levels
Revue annuelle des thèses 3DSi Minatec, 2011, Grenoble, France
hal-00649911v1  Communication dans un congrès
F. ChaveL. VallierP. GouraudS. BaudotC. Roukoss et al.  Etching issues with High-K Metal Gate stacks for CMOS 28nm technology
PESM 4th International Workshop, May 2011, Malines, Belgium
hal-00649913v1  Communication dans un congrès
F. ChaveL. VallierP. GouraudS. BaudotC. Petit-Etienne et al.  Study of Metallic Interfaces Etching for High-K Metal Gate stacks in CMOS 28 nm Technology
AVS 58th International Symposium and Exhibition, Oct 2011, Nashville, United States
hal-00639535v1  Article dans une revue
Jens KattgeSandra DiazSandra LavorelI.C. PrenticePaul Leadley et al.  TRY - a global database of plant traits
Global Change Biology, Wiley, 2011, 17 (9), pp.2905-2935. <10.1111/j.1365-2486.2011.02451.x>