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hal-00935012v1
Article dans une revue
R. Boichot, N. Coudurier, F. Mercier, A. Claudel, N. Baccar et al. CFD modeling of the high-temperature HVPE growth of aluminum nitride layers on c-plane sapphire: from theoretical chemistry to process evaluationTheoretical Chemistry Accounts: Theory, Computation, and Modeling, Springer Verlag, 2013, 133 (1), <10.1007/s00214-013-1419-8>
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