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hal-00650184v1  Communication dans un congrès
A. SalaünV. BeuginH. GrampeixC. LicitraN. Rochat et al.  ALD/PEALD CMOS Compatible Oxide for Resistive RAM
58th National Symposium AVS, Oct 2011, Nashville, United States
hal-00650189v1  Communication dans un congrès
M. BonvalotC. MannequinP. GononC. ValléeV. Jousseaume et al.  Resistive Switching in HfO2 Metal-Insulator-Metal Devices
58th National Symposium AVS, Oct 2011, Nashville, United States
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inria-00200450v1  Communication dans un congrès
Gwen SalaünWendelin SerweYvain ThonnartPascal VivetFormal Verification of CHP Specifications with CADP - Illustration on an Asynchronous Network-on-Chip
Proceedings of the 13th IEEE International Symposium on Asynchronous Circuits and Systems ASYNC 2007, Mar 2007, Berkeley, California, United States. 2007
hal-00650216v1  Communication dans un congrès
P.H MorelJ.M HartmannC. MorinP. FaucherandS. Perraud et al.  Study and Comparison of Guided Silicon Nanostructures for MOS Devices: CVD versus Epitaxy
MRS Fall meeting 2010, Nov 2010, Boston, United States
hal-00951022v1  Communication dans un congrès
E. PargonM. FouchierM. BrihoumL. AzarnoucheK. Menguelti et al.  Metrology and Linewidth roughness issues during complex metal/high-k gate stack patterning for sub-20nm technological nodes
60th International AVS Symposium & Topical Conferences, Oct 2013, Long Beach, United States
hal-00266811v1  Chapitre d'ouvrage
Laurent DavoustYves FouilletYoshito IshidaDrop stirring flow under EWOD and EHD actuation: a new step towards biological sample preparation
Proceedings of the microTas conference, 2, J.L. Viovy, P. Tabeling, S. Decroix, L.Malaquin Eds, pp.925-927, 2007
hal-01121591v1  Communication dans un congrès
L. VincentS. ManciniH.P. CharlesS. LesecqAdaptive Data Prefetching for High Performance Processors
HPES (High Performance Embedded Systems) Workshop at the HIPEAC Conférence, Jan 2015, Amsterdam, Netherlands. Proceedings
hal-00620421v1  Chapitre d'ouvrage
Gildas BesanconAlina VodaGuillaume JourdanObserver-based estimation of weak forces in a nanosystem measurement device
A. Voda. Micro, Nanosystems and Systems on Chips: Modeling, Control, and Estimation, Wiley-ISTE, pp.59-83, 2010
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tel-00476706v1  Thèse
Laurent ThévenodÉtude de la mobilité des porteurs dans des transistors MOS intégrant un oxyde de grille de forte permittivité et une grille métallique
Micro et nanotechnologies/Microélectronique. Institut National Polytechnique de Grenoble - INPG, 2009. Français
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hal-00671966v1  Communication dans un congrès
Nicolas HiliChristian FabreSophie Dupuy-ChessaEfficient Embedded System Development: A Workbench for an Integrated Methodology
ERTS 2012 - Embedded Real Time Software and Systems, Feb 2012, Toulouse, France. pp.1-10, 2012
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cea-01176446v1  Communication dans un congrès
Tiana RakotovaoJulien MottinDiego PuschiniChristian LaugierReal-Time Power-Efficient Integration of Multi-Sensor Occupancy Grid on Many-Core
IEEE International Workshop on Advanced Robotics and its Social Impacts. ARSO 2015, Jul 2015, Lyon, France. 2015, <http://arso2015.inria.fr/>
hal-00623452v1  Communication dans un congrès
T. ChevolleauN. PossemeT. DavidR. BouyssouJ. Ducote et al.  Plasma Etching Process Scalability and challenges for ULK Materials
IITC 2010, Jun 2010, Burlingame USA., United States
hal-00828111v1  Chapitre d'ouvrage
A. PuszkaM. DebourdeauL. HervéA. Planat-ChrétienA. Koenig et al.  Tomographie Optique Diffuse résolue en temps en géométrie de réflexion: images de contraste d'absorption en profondeur
S. Mottin et G. Lelièvre. Biophotonique Générale Optique & Imageries pour le Diagnostic dans les Sciences du Vivant et en Médecine, MRCT CNRS, pp.509, 2012, 978-2-918701-11-8
hal-00625357v1  Communication dans un congrès
N. PossemeT. DavidT. ChevolleauM. DarnonF. Bailly et al.  Porous SiCOH Patterning for Advanced Interconnects: Challenges and Solutions
Electrochem. 219th Soc. Meeting, 2011, Montreal, Canada
hal-00625370v1  Communication dans un congrès
M. HaassM. DarnonE. PargonG. CungeS. Banna et al.  Synchronized pulsed plasmas: potential process improvements for patterning technologies
63rd Gaseous Electronic Conference and 7th International Conference on Reactive Plasmas, Oct 2010, Paris, France
hal-00625314v1  Communication dans un congrès
T. ChevolleauN. PossemeT. DavidR. BouyssouJ. Ducote et al.  Etching Process Scalability and Challenges for ULK Materials
Proceeding of IEEE International Interconnect Technology Conference, IITC, Jun 2010, DRESDE, Germany
hal-00625365v1  Communication dans un congrès
N. PossemeT. ChevolleauT. DavidM. DarnonF. Bailly et al.  Plasma Processes Challenges for Porous SiOCH Patterning in Advanced Interconnects
AVS 57th international symposium, 2010, Albuquerque, United States
hal-00625356v1  Communication dans un congrès
M. DarnonT. ChevolleauT. DavidN. PossemeR. Bouyssou et al.  Characterizing Plasma Induced Damage to Ultra Low-k
China Semiconductor Technology International Conference (CSTIC), Mar 2011, Shanghaï, China
hal-00625378v1  Communication dans un congrès
O. JoubertE. PargonG. CungeM. DarnonL. Vallier et al.  Challenges and future prospects in plasma etching processes
3rd International Conference on PLAsma NanoTechnology and Science, Mar 2010, Nagoya,, Japan
hal-00625382v1  Communication dans un congrès
R. BouyssouT. ChevolleauM. El KodadiM. BesacierN. Possémé et al.  Sidewall Modification of Porous SiOCH Induced by Etching and Post Etching Plasma Treatments
3rd Plasma Etch and Strip in Microelectronics Workshop, Mar 2010, Grenoble, France
hal-00625271v1  Communication dans un congrès
V. JousseaumeC. GuedjJ.F. NodinA. PersicoH. Feldis et al.  The impact of oxide properties on resistive RAM electrical characteristics
2010 MRS Spring Meeting, 2010, San Francisco (USA), United States
hal-00980561v1  Communication dans un congrès
Alexis PeschotChristophe PoulainH. SibuetFrédéric SouchonNelly Bonifaci et al.  Spectroscopic Analysis of Material Transfer Phenomena in MEMS Switches
IEEE International Reliability Physics Symposium (IRPS), Apr 2013, Monterey, United States. 2013