Sol-Gel Based Direct Photolitography : Principle and Applications

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http://hal.univ-grenoble-alpes.fr/hal-02369412
Contributor : David Riassetto <>
Submitted on : Tuesday, November 19, 2019 - 12:05:02 AM
Last modification on : Wednesday, November 20, 2019 - 1:07:08 AM

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David Riassetto, Morgane Bonnel, Michel Langlet. Sol-Gel Based Direct Photolitography : Principle and Applications. International Congress on Advanced Materials sciences and Engeering, Jul 2019, Osaka, Japan. ⟨hal-02369412⟩

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