Microlens under melt in-line monitoring based on application of neural network automatic defect classi_cation

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http://hal.univ-grenoble-alpes.fr/hal-02362788
Contributor : Marielle Clot <>
Submitted on : Thursday, November 14, 2019 - 9:33:11 AM
Last modification on : Friday, November 15, 2019 - 1:16:08 AM

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  • HAL Id : hal-02362788, version 1

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Julien Ducote, Amine Lakcher, Laurent Bidault, Antoine-Regis Philipot, Bertrand Le-Gratiet, et al.. Microlens under melt in-line monitoring based on application of neural network automatic defect classi_cation. 34th European Mask and Lithography Conference, 2018, Grenoble, France. ⟨hal-02362788⟩

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