Manufacturing of roughness standard samples based on ACF/PSD model programming

Jérôme Reche 1 Maxime Besacier 1 Patrice Gergaud 2 Yoann Blancquaert
1 LTM - Laboratoire des technologies de la microélectronique
2 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information
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Journal articles
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http://hal.univ-grenoble-alpes.fr/hal-02344525
Contributor : Marielle Clot <>
Submitted on : Monday, November 4, 2019 - 11:04:05 AM
Last modification on : Wednesday, November 6, 2019 - 1:44:50 AM

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Jérôme Reche, Maxime Besacier, Patrice Gergaud, Yoann Blancquaert. Manufacturing of roughness standard samples based on ACF/PSD model programming. SPIE Proceedings Series, 2018, pp.10775, art. no. 1077519. ⟨10.1117/12.2327095⟩. ⟨hal-02344525⟩

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