Development and characterization of an atmospheric pressure plasma reactor compatible with open-air spatial ALD

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http://hal.univ-grenoble-alpes.fr/hal-02338971
Contributor : Marielle Clot <>
Submitted on : Wednesday, October 30, 2019 - 11:08:06 AM
Last modification on : Friday, November 1, 2019 - 1:06:02 AM

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  • HAL Id : hal-02338971, version 1

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Citation

H. Rabat, F. Zoubian, O. Aubry, N. Dumuis, S. Dozias, et al.. Development and characterization of an atmospheric pressure plasma reactor compatible with open-air spatial ALD. 19th International Conference on Atomic layer Deposition (ALD2019), Jul 2019, Bellevue (USA), United States. ⟨hal-02338971⟩

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