Atomic Layer processing using cold plasma

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http://hal.univ-grenoble-alpes.fr/hal-02338922
Contributor : Marielle Clot <>
Submitted on : Wednesday, October 30, 2019 - 10:59:45 AM
Last modification on : Friday, November 1, 2019 - 1:06:02 AM

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  • HAL Id : hal-02338922, version 1

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Vallée Christophe. Atomic Layer processing using cold plasma. AIST, Mar 2019, Tsukuba, Japan. ⟨hal-02338922⟩

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