PEALD and ALE for Area Selective Deposition

Vallée Christophe 1
1 LTM - Laboratoire des technologies de la microélectronique
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Conference papers
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http://hal.univ-grenoble-alpes.fr/hal-02338860
Contributor : Marielle Clot <>
Submitted on : Wednesday, October 30, 2019 - 10:46:46 AM
Last modification on : Friday, November 1, 2019 - 1:06:00 AM

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Vallée Christophe. PEALD and ALE for Area Selective Deposition. 236th ECS Fall Meeting, Oct 2019, Atlanta (USA), United States. ⟨hal-02338860⟩

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