pARXPS study of GeSbTe surface oxidation

Ludovic Goffart 1 C. Vallee 1 J -P. Reynard 2 G. Navarro B. Pelissier 1
1 LTM - Laboratoire des technologies de la microélectronique
2 ST-CROLLES - STMicroelectronics [Crolles]
Document type :
Conference papers
Complete list of metadatas
http://hal.univ-grenoble-alpes.fr/hal-02337696
Contributor : Marielle Clot <>
Submitted on : Tuesday, October 29, 2019 - 3:39:58 PM
Last modification on : Thursday, October 31, 2019 - 1:03:51 AM

Identifiers

  • HAL Id : hal-02337696, version 1

Collections

CNRS | CEA | LTM | UGA

Citation

Ludovic Goffart, C. Vallee, J -P. Reynard, G. Navarro, B. Pelissier. pARXPS study of GeSbTe surface oxidation. AVS 66th international symposium, Oct 2019, Columbus, United States. ⟨hal-02337696⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

7