A brief overview on Molecular Dynamics simulations of plasma-surface interaction in reactive ion etching

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http://hal.univ-grenoble-alpes.fr/hal-02337554
Contributor : Marielle Clot <>
Submitted on : Tuesday, October 29, 2019 - 3:03:44 PM
Last modification on : Thursday, October 31, 2019 - 1:03:52 AM

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Emilie Despiau-Pujo. A brief overview on Molecular Dynamics simulations of plasma-surface interaction in reactive ion etching. 66th American Vacuum Society (AVS) International Symposium, Oct 2019, Columbus, United States. ⟨hal-02337554⟩

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