Effect of wet treatments on the electrical properties of Al2O3/GeSn MOS capacitors

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http://hal.univ-grenoble-alpes.fr/hal-02332929
Contributor : Marielle Clot <>
Submitted on : Friday, October 25, 2019 - 10:24:28 AM
Last modification on : Tuesday, October 29, 2019 - 9:08:58 AM

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  • HAL Id : hal-02332929, version 1

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B. Salem, M. A. Mahjoub, T. Haffner, Y. Guerfi, S. Labau, et al.. Effect of wet treatments on the electrical properties of Al2O3/GeSn MOS capacitors. EMRS Fall Meeting, 2019, EMRS Fall Meeting 2019 (Varsovie, Pologne), Poland. ⟨hal-02332929⟩

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