Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic

B. Pelissier 1 R. Vallat 1 R. Gassilloud 2 S. Labau 1 C. Vallee 1
1 LTM - Laboratoire des technologies de la microélectronique
2 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information
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Conference papers
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http://hal.univ-grenoble-alpes.fr/hal-02332009
Contributor : Marielle Clot <>
Submitted on : Thursday, October 24, 2019 - 3:45:41 PM
Last modification on : Saturday, October 26, 2019 - 2:00:39 AM

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  • HAL Id : hal-02332009, version 1

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B. Pelissier, R. Vallat, R. Gassilloud, S. Labau, C. Vallee. Quasi insitu XPS characterization applied to PEALD selective deposition of TiO2 The IMPACT 300mm project and platform: merging academic research and industrial applications in microelectronic. ECASIA 2019, Sep 2019, Dresde, Germany. ⟨hal-02332009⟩

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