Ultra low-loss silicon waveguides for 200 mm photonics platform

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http://hal.univ-grenoble-alpes.fr/hal-02324911
Contributor : Marielle Clot <>
Submitted on : Tuesday, October 22, 2019 - 10:10:14 AM
Last modification on : Monday, December 9, 2019 - 4:30:12 PM

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Q. Wilmart, C. Bellegarde, C. Petit-Etienne, L. Youssef, J-M Hartmann, et al.. Ultra low-loss silicon waveguides for 200 mm photonics platform. IEEE 2019 International conference on Group IV photonics (GFP 2019), Aug 2019, Singapore, Singapore. ⟨10.1109/GROUP4.2019.8853923⟩. ⟨hal-02324911⟩

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