Unit-cell design of a force sensing device based on vertical piezoelectric nanowires

Edgar Leon Perez 1 Mireille Mouis 2 Sven Salomon 1 Gustavo Ardila 2 Emmanuelle Pauliac-Vaujour 1
1 CEA-LETI - Laboratoire d'Electronique et des Technologies de l'Information
2 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
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Conference papers
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http://hal.univ-grenoble-alpes.fr/hal-02067130
Contributor : Frédérique Ducroquet <>
Submitted on : Thursday, March 14, 2019 - 9:32:35 AM
Last modification on : Wednesday, April 3, 2019 - 2:08:57 AM

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  • HAL Id : hal-02067130, version 1

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CNRS | CEA | UNIV-SAVOIE | DRT | LETI | IMEP-LAHC | CMNE | UGA | CEA-GRE

Citation

Edgar Leon Perez, Mireille Mouis, Sven Salomon, Gustavo Ardila, Emmanuelle Pauliac-Vaujour. Unit-cell design of a force sensing device based on vertical piezoelectric nanowires. 2nd International Conference on Nanogenerators and Piezotronics (NGPT), Georgia Institute of Technology, Jun 2014, Atlanta, United States. ⟨hal-02067130⟩

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