(Invited) SOI-Type Bonded Structures for Advanced Technology Nodes

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http://hal.univ-grenoble-alpes.fr/hal-01991972
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Submitted on : Thursday, January 24, 2019 - 10:59:04 AM
Last modification on : Saturday, May 4, 2019 - 4:52:02 PM

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J. Widiez, J. Hartmann, F. Mazen, S. Sollier, C. Veytizou, et al.. (Invited) SOI-Type Bonded Structures for Advanced Technology Nodes. ECS Transactions, Electrochemical Society, Inc., 2014, 64 (5), pp.35-48. ⟨10.1149/06405.0035ecst⟩. ⟨hal-01991972⟩

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